U.S. federal trademark · Serial No. 88051883 · Reg. No. 6125166
Atomic layer deposition systems comprised of a reaction chamber, a wafer handler, electronic control circuitry and electronic components therefor, all sold as a unit, for use in applying atomic layer coatings on various surfaces
Source: USPTO federal trademark records. Informational only, not legal advice. Status and details may lag the live USPTO database.