SEMICONDUCTOR WAFER PROCESSING EQUIPMENT AND COMPONENTS, NAMELY PHYSICAL VAPOR DEPOSITION REACTORS, CHEMICAL VAPOR DEPOSITION REACTORS, CHEMICAL MECHANICAL POLISHERS, WAFER POLISHERS, PLASMA ETCHERS, WAFER CLEANERS, ION IMPLANTERS

'chemic':12,16 'cleaner':24 'compon':6 'deposit':10,14 'equip':4 'etcher':22 'implant':26 'ion':25 'mechan':17 'name':7 'physic':8 'plasma':21 'polish':18,20 'process':3 'reactor':11,15 'semiconductor':1 'vapor':9,13 'wafer':2,19,23

FAB AUTOMATION INTERFACE AND PROCESS PLATFORM, NAMELY AUTOMATED MACHINES FOR TRANSPORT, HANDLING AND STORAGE OF SEMICONDUCTOR WAFERS, WAFER CASSETTES, WAFER BOXES AND OTHER MATERIAL FOR SEMICONDUCTOR DEVICES

'autom':2,8 'box':21 'cassett':19 'devic':27 'fab':1 'handl':12 'interfac':3 'machin':9 'materi':24 'name':7 'platform':6 'process':5 'semiconductor':16,26 'storag':14 'transport':11 'wafer':17,18,20

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