Software-controlled systems used in the semiconductor manufacturing industry, namely, recorded software for automating and controlling machines that manufacture semiconductors and computer memory hardware containing the foregoing recorded software; recorded computer software for operating semiconductor wafer processing equipment

'autom':15 'comput':23,32 'contain':26 'control':3,17 'equip':39 'forego':28 'hardwar':25 'industri':10 'machin':18 'manufactur':9,20 'memori':24 'name':11 'oper':35 'process':38 'record':12,29,31 'semiconductor':8,21,36 'softwar':2,13,30,33 'software-control':1 'system':4 'use':5 'wafer':37

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