Metal organic vapor phase deposition system, namely, a gas distribution system used in the manufacture of semiconductor devices, comprised of system-dependent vacuum components, namely, pumps, and other machined components, namely, tube fittings, viewports, gaskets, injector plates, adjustable viewport tubes, screen and viewport spacers, injector rings, and weldment flanges; all of the aforementioned sold as a unit

'adjust':39 'aforement':54 'compon':25,31 'compris':19 'depend':23 'deposit':5 'devic':18 'distribut':10 'fit':34 'flang':50 'gas':9 'gasket':36 'injector':37,46 'machin':30 'manufactur':15 'metal':1 'name':7,26,32 'organ':2 'phase':4 'plate':38 'pump':27 'ring':47 'screen':42 'semiconductor':17 'sold':55 'spacer':45 'system':6,11,22 'system-depend':21 'tube':33,41 'unit':58 'use':12 'vacuum':24 'vapor':3 'viewport':35,40,44 'weldment':49

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