sputtering deposition systems (apparatus) to produce Flat Panel Displays (FPD) or Liquid Crystal Displays (LCD) with the technology of Thin Film Transistors (TFT) and/or by use of Indium Tin Oxide (ITO) electrodes as well as for the production of chrom black matrix coatings

'and/or':24 'apparatus':4 'black':41 'chrom':40 'coat':43 'crystal':13 'deposit':2 'display':9,14 'electrod':32 'film':21 'flat':7 'fpd':10 'indium':28 'ito':31 'lcd':15 'liquid':12 'matrix':42 'oxid':30 'panel':8 'produc':6 'product':38 'sputter':1 'system':3 'technolog':18 'tft':23 'thin':20 'tin':29 'transistor':22 'use':26 'well':34

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