Filter system composed of a water, chemical or slurry filtration cartridge and distribution manifold for industrial use, namely, in the filtration and purification of chemicals, water and slurries

'cartridg':11 'chemic':7,25 'compos':3 'distribut':13 'filter':1 'filtrat':10,21 'industri':16 'manifold':14 'name':18 'purif':23 'slurri':9,28 'system':2 'use':17 'water':6,26

Liquid filtration and purification subsystems composed of filters and housings to remove undesirable particles, gels and other contaminants from wet chemicals in semiconductor manufacturing applications

'applic':25 'chemic':21 'compos':6 'contamin':18 'filter':8 'filtrat':2 'gel':15 'hous':10 'liquid':1 'manufactur':24 'particl':14 'purif':4 'remov':12 'semiconductor':23 'subsystem':5 'undesir':13 'wet':20

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