U.S. federal trademark · Serial No. 90576017 · Reg. No. 7013203
Semiconductor polishing activation equipment for use with a chemical-mechanical polisher (CMP) tool, namely, a light source and an acoustic wave source sold as an integral component of chemical mechanical polishing (CMP) machines; semiconductor polishing activation equipment for use with a chemical-mechanical polisher (CMP) tool, namely, a slurry injector machine that features an acoustic wave source, a light source, or an acoustic wave and a light source that bombards the slurry prior to leaving the injector to modify the slurry for improved cleaning of a wafer
Source: USPTO federal trademark records. Informational only, not legal advice. Status and details may lag the live USPTO database.