machines for use in the field of semiconductors, namely machines for depositing films of semiconductor wafers, machines for manufacturing semiconductor wafers, machines for chemical deposition, plasma or reactive ion etching machines, sputtering machines, evaporators, plating machines, machines for handling and storing semiconductor wafers

'chemic':24 'deposit':12,25 'etch':30 'evapor':34 'field':6 'film':13 'handl':39 'ion':29 'machin':1,10,17,22,31,33,36,37 'manufactur':19 'name':9 'plasma':26 'plate':35 'reactiv':28 'semiconductor':8,15,20,42 'sputter':32 'store':41 'use':3 'wafer':16,21,43

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