U.S. federal trademark · Serial No. 86826632 · Reg. No. 4997594
Semiconductor wafer processing equipment, and components, namely, epitaxial reactors, chemical vapor deposition reactors, physical vapor deposition reactors, plasma etchers, ion implanters, and chemical mechanical polishers, and monitoring equipment; all for the processing and production of semiconductor substrates, thin films, silicon discs and wafers
Source: USPTO federal trademark records. Informational only, not legal advice. Status and details may lag the live USPTO database.