manufacturing machines for thin film processing in the production of thin film transistors and other electronic products, and parts thereof; and manufacturing machines for liquid crystal displays for use in electronic products, and parts thereof

'crystal':26 'display':27 'electron':16,31 'film':5,12 'liquid':25 'machin':2,23 'manufactur':1,22 'part':19,34 'process':6 'product':9,17,32 'thereof':20,35 'thin':4,11 'transistor':13 'use':29

semiconductor wafer processing equipment and components; namely, epitaxial reactors, chemical vapor deposition reactors, physical vapor deposition reactors, plasma etchers, ion implanters, supporting frames therefor, and parts therefor

'chemic':10 'compon':6 'deposit':12,16 'epitaxi':8 'equip':4 'etcher':19 'frame':23 'implant':21 'ion':20 'name':7 'part':26 'physic':14 'plasma':18 'process':3 'reactor':9,13,17 'semiconductor':1 'support':22 'therefor':24,27 'vapor':11,15 'wafer':2

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