Semiconductor and dielectric wafer fabrication and processing equipment and components, namely, chemical vapor deposition reactors, physical vapor deposition reactors, plasma etchers, ion implantors, wafer transport devices for use with semiconductor and dielectric wafer fabrication and processing equipment and components, and parts therefor.

'chemic':12 'compon':10,39 'deposit':14,18 'devic':26 'dielectr':3,32 'equip':8,37 'etcher':21 'fabric':5,34 'implantor':23 'ion':22 'name':11 'part':41 'physic':16 'plasma':20 'process':7,36 'reactor':15,19 'semiconductor':1,30 'therefor':42 'transport':25 'use':28 'vapor':13,17 'wafer':4,24,33

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