Substrate inspection system, comprising hardware and associated software for measurement of substrates, namely, semiconductor wafers, to determine wafer flatness, shape, thickness, Bow Wrap and SORI, resistivity, conductivity and notch detection

'associ':7 'bow':22 'compris':4 'conduct':27 'detect':30 'determin':17 'flat':19 'hardwar':5 'inspect':2 'measur':10 'name':13 'notch':29 'resist':26 'semiconductor':14 'shape':20 'softwar':8 'sori':25 'substrat':1,12 'system':3 'thick':21 'wafer':15,18 'wrap':23

GALAXY AFS-300

Owner

Goods & Services