Very high sensitivity transmission measuring tool comprising a deep ultraviolet broadband light source and a deep ultraviolet photodetector for use in manufacturing photomasks that are used in the further manufacture of semiconductors, said tool utilizing non-imaging optics, an ultra-precision motion apparatus and ultra-clean room environment that allows safe handling of semiconductor manufacturing materials

'allow':53 'apparatus':45 'broadband':11 'clean':49 'compris':7 'deep':9,16 'environ':51 'handl':55 'high':2 'imag':38 'light':12 'manufactur':22,30,58 'materi':59 'measur':5 'motion':44 'non':37 'non-imag':36 'optic':39 'photodetector':18 'photomask':23 'precis':43 'room':50 'safe':54 'said':33 'semiconductor':32,57 'sensit':3 'sourc':13 'tool':6,34 'transmiss':4 'ultra':42,48 'ultra-clean':47 'ultra-precis':41 'ultraviolet':10,17 'use':20,26 'util':35

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