carriers, namely, support structures for handling or shipping semiconductor wafers, die, substrates and chips; mechanical apparatus comprised of vacuum release receptacles and pumps for releasing semiconductor wafers, die, substrates and chips from carriers or support structures

'apparatus':16 'carrier':1,33 'chip':14,31 'compris':17 'die':11,28 'handl':6 'mechan':15 'name':2 'pump':23 'receptacl':21 'releas':20,25 'semiconductor':9,26 'ship':8 'structur':4,36 'substrat':12,29 'support':3,35 'vacuum':19 'wafer':10,27

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