carriers, namely, support structures for handling or shipping semi-conductor wafers, die, substrates and chips; mechanical apparatus comprised of vacuum release receptacles and pumps for releasing semiconductor wafers, die, substrates and chips from carriers or support structures

'apparatus':18 'carrier':1,35 'chip':16,33 'compris':19 'conductor':11 'die':13,30 'handl':6 'mechan':17 'name':2 'pump':25 'receptacl':23 'releas':22,27 'semi':10 'semi-conductor':9 'semiconductor':28 'ship':8 'structur':4,38 'substrat':14,31 'support':3,37 'vacuum':21 'wafer':12,29

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