Electronic measuring equipment, namely, power, voltage, and current sensors, analysis software and signal-conditioning electronics for use in plasmas processes; electrical impedance measuring systems, comprised of power, voltage and current sensors, analysis software, and signal-conditioning electronics for measuring electrical impedance for use in plasma processes, to determine plasma characteristics and quality, and for other related purposes

'analysi':10,33 'characterist':52 'compris':26 'condit':15,38 'current':8,31 'determin':50 'electr':22,42 'electron':1,16,39 'equip':3 'imped':23,43 'measur':2,24,41 'name':4 'plasma':20,47,51 'power':5,28 'process':21,48 'purpos':59 'qualiti':54 'relat':58 'sensor':9,32 'signal':14,37 'signal-condit':13,36 'softwar':11,34 'system':25 'use':18,45 'voltag':6,29

GENCAL

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