Semiconductor manufacturing machines and structural parts thereof; Semiconductor wafer processing equipment; Semiconductor substrates manufacturing machines; semiconductor manufacturing machines, namely film deposition and removal units, employed by the semiconductor industry in the fabrication of integrated circuits and the like; coating machines for depositing of ultra-thin films, employed by the data storage, micro-electromechanical, and opto-electronic industry in the fabrication of data-storage, micro-electromechanical and opto-electronic components

'circuit':35 'coat':39 'compon':75 'data':51,66 'data-storag':65 'deposit':21,42 'electromechan':55,70 'electron':59,74 'employ':25,48 'equip':11 'fabric':32,63 'film':20,47 'industri':29,60 'integr':34 'like':38 'machin':3,15,18,40 'manufactur':2,14,17 'micro':54,69 'micro-electromechan':53,68 'name':19 'opto':58,73 'opto-electron':57,72 'part':6 'process':10 'remov':23 'semiconductor':1,8,12,16,28 'storag':52,67 'structur':5 'substrat':13 'thereof':7 'thin':46 'ultra':45 'ultra-thin':44 'unit':24 'wafer':9

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