Installation, maintenance and repair services of laser apparatus and extreme ultraviolet light generation apparatus for semiconductor manufacturing

'apparatus':8,14 'extrem':10 'generat':13 'instal':1 'laser':7 'light':12 'mainten':2 'manufactur':17 'repair':4 'semiconductor':16 'servic':5 'ultraviolet':11

Educational services, namely, classes, seminars and training in the field of use, maintenance and repair of laser apparatus and extreme ultraviolet light generation apparatus for semiconductor manufacturing

'apparatus':18,24 'class':4 'educ':1 'extrem':20 'field':10 'generat':23 'laser':17 'light':22 'mainten':13 'manufactur':27 'name':3 'repair':15 'semiconductor':26 'seminar':5 'servic':2 'train':7 'ultraviolet':21 'use':12

Excimer lasers for semiconductor manufacturing; extreme ultraviolet light irradiators for semiconductor manufacturing

'excim':1 'extrem':6 'irradi':9 'laser':2 'light':8 'manufactur':5,12 'semiconductor':4,11 'ultraviolet':7

Providing temporary use of non-downloadable computer programs for use of laser apparatus and extreme ultraviolet light generation apparatus for semiconductor manufacturing

'apparatus':14,20 'comput':8 'download':7 'extrem':16 'generat':19 'laser':13 'light':18 'manufactur':23 'non':6 'non-download':5 'program':9 'provid':1 'semiconductor':22 'temporari':2 'ultraviolet':17 'use':3,11

GIGAPHOTON

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