Capital equipment for semiconductor manufactures, namely, chemical and mechanical planarization and copper electroplating machines and replacement parts therefor; components used in the semiconductor industry, namely, as mechanical dry pumps, turbo molecular pumps and cryogenic pumps

'capit':1 'chemic':7 'compon':19 'copper':12 'cryogen':34 'dri':28 'electropl':13 'equip':2 'industri':24 'machin':14 'manufactur':5 'mechan':9,27 'molecular':31 'name':6,25 'part':17 'planar':10 'pump':29,32,35 'replac':16 'semiconductor':4,23 'therefor':18 'turbo':30 'use':20

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