Computer hardware, computer software for use in controlling and operating equipment used to fabricate semiconductors and substrates containing semiconductors; electronic control systems for machines used to fabricate semiconductors and substrates containing semiconductors; electromechanical control systems for machines used to fabricate semiconductors and substrates containing semiconductors

'comput':1,3 'contain':18,31,44 'control':8,21,34 'electromechan':33 'electron':20 'equip':11 'fabric':14,27,40 'hardwar':2 'machin':24,37 'oper':10 'semiconductor':15,19,28,32,41,45 'softwar':4 'substrat':17,30,43 'system':22,35 'use':6,12,25,38

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