Machines used to strip photo-resist and/or other organic residues off substrates in the semiconductor industry and other electronics industries; machines used to produce peroxide-sulfuric acid for stripping photo-resist and/or other residues off substrates in the semiconductor and other electronics industries; all of the foregoing having minimized environmental impact through reduced consumption of processing liquids

'acid':29 'and/or':8,35 'consumpt':57 'electron':20,45 'environment':53 'forego':50 'impact':54 'industri':17,21,46 'liquid':60 'machin':1,22 'minim':52 'organ':10 'peroxid':27 'peroxide-sulfur':26 'photo':6,33 'photo-resist':5,32 'process':59 'produc':25 'reduc':56 'residu':11,37 'resist':7,34 'semiconductor':16,42 'strip':4,31 'substrat':13,39 'sulfur':28 'use':2,23

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