semiconductor wafer processing equipment and components, namely, epitaxial reactors, chemical vapor deposition reactors, physical vapor deposition reactors, plasma etchers, ion implanters, chemical mechanical polishers and parts therefor and computer programs for the operation of the semiconductor wafer processing equipment

'chemic':10,22 'compon':6 'comput':29 'deposit':12,16 'epitaxi':8 'equip':4,39 'etcher':19 'implant':21 'ion':20 'mechan':23 'name':7 'oper':33 'part':26 'physic':14 'plasma':18 'polish':24 'process':3,38 'program':30 'reactor':9,13,17 'semiconductor':1,36 'therefor':27 'vapor':11,15 'wafer':2,37

repair and maintenance services for semiconductor wafer processing equipment and components

'compon':11 'equip':9 'mainten':3 'process':8 'repair':1 'semiconductor':6 'servic':4 'wafer':7

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