Microlithography machines and via-generation machines used to manufacture microchips, printed circuit boards, flat panel displays, multi-chip modules, and micro-electro-mechanical systems such as deformable micromirror device arrays

'array':33 'board':14 'chip':20 'circuit':13 'deform':30 'devic':32 'display':17 'electro':25 'flat':15 'generat':6 'machin':2,7 'manufactur':10 'mechan':26 'micro':24 'micro-electro-mechan':23 'microchip':11 'microlithographi':1 'micromirror':31 'modul':21 'multi':19 'multi-chip':18 'panel':16 'print':12 'system':27 'use':8 'via':5 'via-gener':4

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