machines for use in the field of semiconductors, namely, machines for depositing films on semiconductor wafers, machines for manufacturing semiconductor wafers, machines for chemical deposition, plasma or reactive ion etching machines, sputtering machines, evaporators, plating machines, machines for handling and storing semiconductor wafers

'chemic':24 'deposit':12,25 'etch':30 'evapor':34 'field':6 'film':13 'handl':39 'ion':29 'machin':1,10,17,22,31,33,36,37 'manufactur':19 'name':9 'plasma':26 'plate':35 'reactiv':28 'semiconductor':8,15,20,42 'sputter':32 'store':41 'use':3 'wafer':16,21,43

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