HIGHTEMP

Owner

Goods & Services

Apparatus and instruments for physics, namely, in-situ semiconductor process monitoring systems comprised of wafer based electronic sensors, thermal measurement elements, and data acquisition electronics for measuring temporal and spatial temperature profiles inside semiconductor processing equipment; Diagnostic equipment for research laboratory use, namely, wafer based thermal measurement devices for monitoring process tool thermal uniformity; Computer software, recorded, for analyzing and displaying temperature and process tool thermal data; Computer software applications, downloadable, for collecting, processing, visualizing and reporting wafer based thermal measurement data