Equipment in the nature of metrology systems consisting of wafer probers, microscopes, nanopositioners for moving the probe cards and electronic components, probe cards, automatic test equipment, and downloadable automation software with computer vision capability, used to test thin film materials, semiconductors, conductors, wafers, and semiconductor chips, namely, chiplets being integrated circuits and advanced packages being multiple semiconductor chips and electronic components being semiconductor wafers, switches, and integrated circuits integrated together

'advanc':53 'autom':29 'automat':24 'capabl':34 'card':18,23 'chip':46,58 'chiplet':48 'circuit':51,68 'compon':21,61 'comput':32 'conductor':42 'consist':8 'download':28 'electron':20,60 'equip':1,26 'film':39 'integr':50,67,69 'materi':40 'metrolog':6 'microscop':12 'move':15 'multipl':56 'name':47 'nanoposition':13 'natur':4 'packag':54 'probe':17,22 'prober':11 'semiconductor':41,45,57,63 'softwar':30 'switch':65 'system':7 'test':25,37 'thin':38 'togeth':70 'use':35 'vision':33 'wafer':10,43,64

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