repair and maintenance services for semiconductor wafer processing equipment and components thereof

'compon':11 'equip':9 'mainten':3 'process':8 'repair':1 'semiconductor':6 'servic':4 'thereof':12 'wafer':7

semiconductor wafer processing equipment and components, namely epitaxial reactors, chemical vapor deposition reactors, physical vapor deposition reactors, plasma etchers, ion implanter, rapid thermal processing devices, supporting frames therefor; and parts and components thereof; and computer programs for use therewith

'chemic':10 'compon':6,32 'comput':35 'deposit':12,16 'devic':25 'epitaxi':8 'equip':4 'etcher':19 'frame':27 'implant':21 'ion':20 'name':7 'part':30 'physic':14 'plasma':18 'process':3,24 'program':36 'rapid':22 'reactor':9,13,17 'semiconductor':1 'support':26 'therefor':28 'thereof':33 'therewith':39 'thermal':23 'use':38 'vapor':11,15 'wafer':2

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