Manufacture of semiconductor wafers and semiconductor substrates; Treating and processing semiconductor wafers and semiconductor substrates, namely, automated ozone gas incorporated into a fluid carrier media, combined with or without additive aqueous chemicals, for the manufacture of semiconductor wafers and semiconductor substrates run as a production method performed on an automated platform.

'addit':30 'aqueous':31 'autom':17,50 'carrier':24 'chemic':32 'combin':26 'fluid':23 'gas':19 'incorpor':20 'manufactur':1,35 'media':25 'method':46 'name':16 'ozon':18 'perform':47 'platform':51 'process':10 'product':45 'run':42 'semiconductor':3,6,11,14,37,40 'substrat':7,15,41 'treat':8 'wafer':4,12,38 'without':29

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