U.S. federal trademark · Serial No. 78267524 · Reg. No. 2986240
machines and structural parts therefor, for the production, treatment, transport and processing of electronic components, especially semiconductors, in the field of microelectronic, medical technology, biotechnology, semiconductor technology and microsystems technology; machines and structural parts therefor, for the production, treatment and processing of semiconductors; machines and structural parts therefor for treatment of surfaces of electronic components, especially wafers
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