Computer hardware; semiconductor and wafer defect inspection systems comprised of computer software, final test data and electrical data algorithms, and inline defect and metrology computer hardware equipment; computer software for process control and yield management for the semiconductor, integrated circuit and related microelectronics manufacturing in the automotive industry; computer software for testing and inspecting physical and electrical properties of semiconductors, integrated circuits and microelectronics; computer software for use in detecting defective semiconductor electronic components

'algorithm':19 'automot':47 'circuit':40,62 'compon':74 'compris':9 'comput':1,11,25,28,49,65 'control':32 'data':15,18 'defect':6,22,71 'detect':70 'electr':17,57 'electron':73 'equip':27 'final':13 'hardwar':2,26 'industri':48 'inlin':21 'inspect':7,54 'integr':39,61 'manag':35 'manufactur':44 'metrolog':24 'microelectron':43,64 'physic':55 'process':31 'properti':58 'relat':42 'semiconductor':3,38,60,72 'softwar':12,29,50,66 'system':8 'test':14,52 'use':68 'wafer':5 'yield':34

I-PAT

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