Semiconductor fabrication facility equipment, namely, wafer stockers, reticle stockers, wafer cassette transport system comprising a number of transport cars that automatically move along a monorail system loading wafer cassettes at storage stations and transporting them throughout a processing plant, and wafer cassette manipulating system control software

'along':23 'automat':21 'car':19 'cassett':11,29,42 'compris':14 'control':45 'equip':4 'fabric':2 'facil':3 'load':27 'manipul':43 'monorail':25 'move':22 'name':5 'number':16 'plant':39 'process':38 'reticl':8 'semiconductor':1 'softwar':46 'station':32 'stocker':7,9 'storag':31 'system':13,26,44 'throughout':36 'transport':12,18,34 'wafer':6,10,28,41

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