semiconductor manufacturing machines; integrated circuit manufacturing machines; semiconductor elements manufacturing machines; sputtering machines; sputtering systems, namely, thin film making sputterers, surface cleaning sputterers, and etching sputterers for microprocessing [ ; CVD (Chemical Vapor Deposition) machines ]

'chemic':30 'circuit':5 'clean':22 'cvd':29 'deposit':32 'element':9 'etch':25 'film':18 'integr':4 'machin':3,7,11,13,33 'make':19 'manufactur':2,6,10 'microprocess':28 'name':16 'semiconductor':1,8 'sputter':12,14,20,23,26 'surfac':21 'system':15 'thin':17 'vapor':31

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