semiconductor wafer processing equipment and components, namely, epitaxial reactors, chemical vapor deposition reactors, physical vapor deposition reactors, plasma etchers, ion implanter, chemical mechanical polishers, process diagnostic control apparatus; and computer programs for use therewith

'apparatus':28 'chemic':10,22 'compon':6 'comput':30 'control':27 'deposit':12,16 'diagnost':26 'epitaxi':8 'equip':4 'etcher':19 'implant':21 'ion':20 'mechan':23 'name':7 'physic':14 'plasma':18 'polish':24 'process':3,25 'program':31 'reactor':9,13,17 'semiconductor':1 'therewith':34 'use':33 'vapor':11,15 'wafer':2

repair and maintenance services of semiconductor wafer processing equipment, and parts therefore

'equip':9 'mainten':3 'part':11 'process':8 'repair':1 'semiconductor':6 'servic':4 'therefor':12 'wafer':7

IMPLANT XR

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