Thin film, structure, and wafer surface measurement devices, namely, metrology and inspection tools that are designed to fit inside or be mounted onto and control production equipment and metrology equipment used in the manufacture of integrated circuits

'circuit':37 'control':25 'design':16 'devic':8 'equip':27,30 'film':2 'fit':18 'insid':19 'inspect':12 'integr':36 'manufactur':34 'measur':7 'metrolog':10,29 'mount':22 'name':9 'onto':23 'product':26 'structur':3 'surfac':6 'thin':1 'tool':13 'use':31 'wafer':5

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