Photoresists in the nature of chemicals; solutions of chemicals useful to form metal oxide thin films; solutions of chemicals for deposition of metal oxide thin films for use as hard mask layers; metal oxides for use in a photoresist process, namely, solutions of metal oxides; developers, namely, photoresist developers for use with photoresists in the nature of chemicals; underlayer materials in the nature of chemicals, namely, chemical compositions for use with photoresist patterning

'chemic':6,9,19,58,65,67 'composit':68 'deposit':21 'develop':46,49 'film':16,26 'form':12 'hard':30 'layer':32 'mask':31 'materi':60 'metal':13,23,33,44 'name':41,47,66 'natur':4,56,63 'oxid':14,24,34,45 'pattern':73 'photoresist':1,39,48,53,72 'process':40 'solut':7,17,42 'thin':15,25 'underlay':59 'use':10,28,36,51,70

INPRIA

Owners

Goods & Services