Recorded computer software used for running, tracking, and providing feedback for on-tool metrology measurements; recorded computer software used for analysis of Big Data generated from semiconductor wafer processing and metrology, inspection, and review equipment; downloadable computer software for creating algorithms for analysis of Big Data generated from semiconductor wafer processing and metrology, inspection, and review equipment

'algorithm':42 'analysi':22,44 'big':24,46 'comput':2,18,38 'creat':41 'data':25,47 'download':37 'equip':36,58 'feedback':10 'generat':26,48 'inspect':33,55 'measur':16 'metrolog':15,32,54 'on-tool':12 'process':30,52 'provid':9 'record':1,17 'review':35,57 'run':6 'semiconductor':28,50 'softwar':3,19,39 'tool':14 'track':7 'use':4,20 'wafer':29,51

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