Downloadable and prerecorded computer software for use in process control and yield management for the semiconductor, integrated circuit and related microelectronics manufacturing industries; computer hardware and downloadable and prerecorded computer software for testing, inspecting, characterizing, and predicting physical and electrical properties of semiconductors, integrated circuits, microelectronics, and wafers; computer hardware and downloadable and prerecorded computer software for use in detecting imperfections and faults in semiconductor electronic components, integrated circuits, microelectronics, and wafers

'character':35 'circuit':18,45,69 'compon':67 'comput':4,24,30,49,55 'control':10 'detect':60 'download':1,27,52 'electr':40 'electron':66 'fault':63 'hardwar':25,50 'imperfect':61 'industri':23 'inspect':34 'integr':17,44,68 'manag':13 'manufactur':22 'microelectron':21,46,70 'physic':38 'predict':37 'prerecord':3,29,54 'process':9 'properti':41 'relat':20 'semiconductor':16,43,65 'softwar':5,31,56 'test':33 'use':7,58 'wafer':48,72 'yield':12

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