U.S. federal trademark · Serial No. 74667970 · Reg. No. 2968815
automated gas delivery system comprised of a gas distribution, measurement and control apparatus and computer hardware and computer software, for use in semiconductor manufacturing, manufacturing of industrial products, and control of industrial processes, namely, measuring, comparing, and adjusting a characteristic to match a given parameter, in manufacturing and in research and development, and user and instruction manuals sold as a unit
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