U.S. federal trademark · Serial No. 78573090 · Reg. No. 3294801
Industrial production machines for treating/processing semiconductor wafers and substrates, flat panel displays and data disks; fluid and vapor processing machines systems for manufacture of semiconductor wafers, semiconductor substrates, flat panel displays and data disks comprising wafer handling machines, wafer chemical processing machines and related controller sold as a unit thereof
Source: USPTO federal trademark records. Informational only, not legal advice. Status and details may lag the live USPTO database.