Semiconductor manufacturing machines, namely, combination cleaning and processing units used in the processing of materials for the manufacture of semiconductors

'clean':6 'combin':5 'machin':3 'manufactur':2,18 'materi':15 'name':4 'process':8,13 'semiconductor':1,20 'unit':9 'use':10

Semiconductor processing furnaces for processing semiconductor articles, such as semiconductor wafers, substrates, disks and panels; apparatus for rinsing and drying wafers

'apparatus':16 'articl':7 'disk':13 'dri':20 'furnac':3 'panel':15 'process':2,5 'rins':18 'semiconductor':1,6,10 'substrat':12 'wafer':11,21

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