U.S. federal trademark · Serial No. 79107883 · Reg. No. 4239863
Apparatus for the chemical processing of semiconductor wafers, namely, chemical reactors for depositing thin layers on semiconductor wafers; chemical apparatus, namely, chemical reactors for the thermal treatment of semiconductor wafers, reactors for chemical vapor deposition [, also operating with electric gas discharge ]; replacement and structural parts for aforesaid goods
Mechanical machines for use in the semiconductor industry, namely, for the manufacture of semiconductors and the deposition of thin films on semiconductor substrates; electronically operated machines for the manufacture of semiconductor wafers and for the deposition of thin films on semiconductor substrates; replacement and structural parts for aforesaid goods
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