Measuring machines and instruments using optical signals for use in the manufacture of semiconductors, namely, a light source, a detector, processors and software, integrated with semiconductor production equipment, all for the purpose of measuring the dimensions, thickness and profile of the structure formed on a semiconductor wafer

'detector':20 'dimens':36 'equip':28 'form':43 'instrument':4 'integr':24 'light':17 'machin':2 'manufactur':12 'measur':1,34 'name':15 'optic':6 'processor':21 'product':27 'profil':39 'purpos':32 'semiconductor':14,26,46 'signal':7 'softwar':23 'sourc':18 'structur':42 'thick':37 'use':5,9 'wafer':47

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