Semiconductor manufacturing machines, namely, ion implanters for semiconductors and thermal processors for semiconductors; semiconductor wafer cleaning machines; dry etching machines for semiconductors; lithography printing machines for semiconductors; photo resist coating machines for semiconductors; plasma etching machines; plasma sputtering machines

'clean':16 'coat':30 'dri':18 'etch':19,35 'implant':6 'ion':5 'lithographi':23 'machin':3,17,20,25,31,36,39 'manufactur':2 'name':4 'photo':28 'plasma':34,37 'print':24 'processor':11 'resist':29 'semiconductor':1,8,13,14,22,27,33 'sputter':38 'thermal':10 'wafer':15

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