Semiconductor manufacturing equipment, namely, ion implanters being machines for use in accelerating ions into a solid target; Semiconductor manufacturing equipment, namely, ion implanters being machines for shaping patterns; Semiconductor manufacturing equipment, namely, ion implanters being machines for surface and material modification; all of the aforementioned for use in semiconductor fabrication

'acceler':12 'aforement':45 'equip':3,20,31 'fabric':50 'implant':6,23,34 'ion':5,13,22,33 'machin':8,25,36 'manufactur':2,19,30 'materi':40 'modif':41 'name':4,21,32 'pattern':28 'semiconductor':1,18,29,49 'shape':27 'solid':16 'surfac':38 'target':17 'use':10,47

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