Automated system comprising a broad band spectroscopic ellipsometer and reflectometer for use in measuring thin film thickness of dielectric coatings and critical dimensions in the production and fabrication of microscopic and nano-scale devices

'autom':1 'band':6 'broad':5 'coat':20 'compris':3 'critic':22 'devic':35 'dielectr':19 'dimens':23 'ellipsomet':8 'fabric':28 'film':16 'measur':14 'microscop':30 'nano':33 'nano-scal':32 'product':26 'reflectomet':10 'scale':34 'spectroscop':7 'system':2 'thick':17 'thin':15 'use':12

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