Environmental control apparatus, namely, heat pumps and process chillers that provide temperature controlled fluid to the treatment and abatement of process gases, fumes, effluents, and liquids in the semiconductor wafer fabrication process for pollution control purposes

'abat':19 'apparatus':3 'chiller':9 'control':2,13,35 'effluent':24 'environment':1 'fabric':31 'fluid':14 'fume':23 'gase':22 'heat':5 'liquid':26 'name':4 'pollut':34 'process':8,21,32 'provid':11 'pump':6 'purpos':36 'semiconductor':29 'temperatur':12 'treatment':17 'wafer':30

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