semiconductor manufacturing machines, logic chip manufacturing machines and memory chip manufacturing machines, namely, large volume end stations comprised of tandem accelerators, cryo pumps, an ion source, dual vaporizors and three-axis electrode manipulators; machines for implanting ions in semiconductor wafers

'acceler':21 'axi':32 'chip':5,10 'compris':18 'cryo':22 'dual':27 'electrod':33 'end':16 'implant':37 'ion':25,38 'larg':14 'logic':4 'machin':3,7,12,35 'manipul':34 'manufactur':2,6,11 'memori':9 'name':13 'pump':23 'semiconductor':1,40 'sourc':26 'station':17 'tandem':20 'three':31 'three-axi':30 'vaporizor':28 'volum':15 'wafer':41

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