Polymer film for use in manufacturing integrated circuit devices, compound semiconductor devices, microelectromechanical devices, microcircuits, information displays and other circuited devices; polymer film for use in wafer or substrate passivation in integrated circuit devices, compound semiconductor devices, microelectromechanical devices, microcircuits, information displays and other circuited devices

'circuit':8,20,33,45 'compound':10,35 'devic':9,12,14,21,34,37,39,46 'display':17,42 'film':2,23 'inform':16,41 'integr':7,32 'manufactur':6 'microcircuit':15,40 'microelectromechan':13,38 'passiv':30 'polym':1,22 'semiconductor':11,36 'substrat':29 'use':4,25 'wafer':27

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