Technical consulting in the field of ion and plasma sources used in ion beam processing of materials for etching, depositing, or modifying physical properties of materials and power supplies therefor

'beam':14 'consult':2 'deposit':20 'etch':19 'field':5 'ion':7,13 'materi':17,26 'modifi':22 'physic':23 'plasma':9 'power':28 'process':15 'properti':24 'sourc':10 'suppli':29 'technic':1 'therefor':30 'use':11

Ion and plasma sources, namely, scientific apparatus and instruments for ion and plasma formation for use in ion beam processing of materials for etching, depositing, or modifying physical properties of materials; electron source products, namely, scientific apparatus and instruments for generating electron beams and neutralizing positive ion beams for use in ion beam processing of materials for etching, depositing, or modifying physical properties of materials; power supplies and power controllers for use in ion beam processing of materials for etching, depositing, or modifying the physical properties of materials

'apparatus':7,37 'beam':19,43,48,53,75 'control':70 'deposit':25,59,81 'electron':32,42 'etch':24,58,80 'format':14 'generat':41 'instrument':9,39 'ion':1,11,18,47,52,74 'materi':22,31,56,65,78,88 'modifi':27,61,83 'name':5,35 'neutral':45 'physic':28,62,85 'plasma':3,13 'posit':46 'power':66,69 'process':20,54,76 'product':34 'properti':29,63,86 'scientif':6,36 'sourc':4,33 'suppli':67 'use':16,50,72

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