Design of fluid handling machines and control systems

'control':7 'design':1 'fluid':3 'handl':4 'machin':5 'system':8

surface preparation equipment, in particular, tools and wet benches, for chemical processing; electroplating equipment; blending and dispensing systems comprised of pumps, valves, tanks, circulation lines, and filters for media in chemical processing; and gas distribution systems comprised of cabinets, valves, sensors, and controllers for process media in microelectronic, solar and precision manufacturing

'bench':9 'blend':15 'cabinet':39 'chemic':11,31 'circul':24 'compris':19,37 'control':43 'dispens':17 'distribut':35 'electropl':13 'equip':3,14 'filter':27 'gas':34 'line':25 'manufactur':52 'media':29,46 'microelectron':48 'particular':5 'precis':51 'prepar':2 'process':12,32,45 'pump':21 'sensor':41 'solar':49 'surfac':1 'system':18,36 'tank':23 'tool':6 'valv':22,40 'wet':8

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